Fracture mechanics of thin film systems on the sub-micron scale

Kozic D, Treml R, Schöngrundner R, Brunner R, Kiener D, Zechner J, Antretter T & Gänser H-P
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Kozic, D., Treml, R., Schöngrundner, R., Brunner, R., Kiener, D., Zechner, J., … Gänser, H. P. (2015). Fracture mechanics of thin film systems on the sub-micron scale. In 2015 16th international conference on thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE) (p. 7103088 (5 pp.). https://doi.org/10.1109/EuroSimE.2015.7103088