Coherent X-ray beam metrology using 2D high-resolution Fresnel-diffraction analysis

Ruiz-Lopez M, Faenov A, Pikuz T, Ozaki N, Mitrofanov A, Albertazzi B, Hartley N, Matsuoka T, Ochante Y, Tange Y, Yabuuchi T, Habara T, Tanaka KA, Inubushi Y, Yabashi M, Nishikino M, Kawachi T, Pikuz S, Ishikawa T, Kodama R & Bleiner D
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Ruiz-Lopez, M., Faenov, A., Pikuz, T., Ozaki, N., Mitrofanov, A., Albertazzi, B., … Bleiner, D. (2017). Coherent X-ray beam metrology using 2D high-resolution Fresnel-diffraction analysis. Journal of Synchrotron Radiation, 24, 196-204. https://doi.org/10.1107/S1600577516016568