Energy conversion efficiency in low- and atmospheric-pressure plasma polymerization processes, part II: HMDSO

Hegemann D, Nisol B, Watson S & Wertheimer MR
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Hegemann, D., Nisol, B., Watson, S., & Wertheimer, M. R. (2017). Energy conversion efficiency in low- and atmospheric-pressure plasma polymerization processes, part II: HMDSO. Plasma Chemistry and Plasma Processing, 37(1), 257-271. https://doi.org/10.1007/s11090-016-9754-x