Strain engineering in highly mismatched SiGe/Si heterostructures

Isa F, Jung A, Salvalaglio M, Arroyo Rojas Dasilva Y, Marozau I, Meduňa M, Barget M, Marzegalli A, Isella G, Erni R, Pezzoli F, Bonera E, Niedermann P, Sereda O, Gröning P, Montalenti F & von Känel H
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Isa, F., Jung, A., Salvalaglio, M., Arroyo Rojas Dasilva, Y., Marozau, I., Meduňa, M., … von Känel, H. (2017). Strain engineering in highly mismatched SiGe/Si heterostructures. Materials Science in Semiconductor Processing, 70, 117-122. https://doi.org/10.1016/j.mssp.2016.08.019