Evolution of target condition in reactive HiPIMS as a function of duty cycle: an opportunity for refractive index grading

Ganesan R, Akhavan B, Partridge JG, McCulloch DG, McKenzie DR & Bilek MMM
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Ganesan, R., Akhavan, B., Partridge, J. G., McCulloch, D. G., McKenzie, D. R., & Bilek, M. M. M. (2017). Evolution of target condition in reactive HiPIMS as a function of duty cycle: an opportunity for refractive index grading. Journal of Applied Physics, 121(17), 171909 (10 pp.). https://doi.org/10.1063/1.4977824