Monolithic integration of multiple III-V semiconductors on Si for MOSFETs and TFETs

Schmid H, Cutaia D, Gooth J, Wirths S, Bologna N, Moselund KE & Riel H
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Schmid, H., Cutaia, D., Gooth, J., Wirths, S., Bologna, N., Moselund, K. E., & Riel, H. (2016). Monolithic integration of multiple III-V semiconductors on Si for MOSFETs and TFETs. In 2016 IEEE international electron devices meeting (IEDM) (pp. 3.6.1-3.6.4). https://doi.org/10.1109/IEDM.2016.7838340