Methane dissociation process in inductively coupled Ar/H2/CH4 plasma for graphene nano-flakes production

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Mohanta, A., Lanfant, B., Asfaha, M., & Leparoux, M. (2017). Methane dissociation process in inductively coupled Ar/H2/CH4 plasma for graphene nano-flakes production. Applied Physics Letters, 110(9), 093109 (5 pp.). https://doi.org/10.1063/1.4977568