FIBSIMS: secondary ion mass spectrometry capability integrated on an FIBSEM instrument

Choose the citation style.
Pillatsch, L., Priebe, A., Östlund, F., & Michler, J. (2017). FIBSIMS: secondary ion mass spectrometry capability integrated on an FIBSEM instrument. Presented at the 17th European conference on applications of surface and interface analysis ECASIA 2017. Montpellier, France.