Additive manufacturing of semiconductor silicon on silicon using direct laser melting

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Le Dantec, M., Abdulstaar, M., Leistner, M., Leparoux, M., & Hoffmann, P. (2018). Additive manufacturing of semiconductor silicon on silicon using direct laser melting. In M. Meboldt & C. Klahn (Eds.), Industrializing additive manufacturing - proceedings of additive manufacturing in products and applications - AMPA2017 (pp. 104-116). https://doi.org/10.1007/978-3-319-66866-6_10