Reaction and growth mechanisms in Al2O3 deposited via atomic layer deposition: elucidating the hydrogen source

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Guerra-Nuñez, C., Döbeli, M., Michler, J., & Utke, I. (2017). Reaction and growth mechanisms in Al2O3 deposited via atomic layer deposition: elucidating the hydrogen source. Chemistry of Materials, 29(20), 8690-8703. https://doi.org/10.1021/acs.chemmater.7b02759