Nanomechanical test specimen preparation techniques by microfabrication and two-photon polymerization to avoid FIB induced implantation damage

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Pethö, L., Schürch, P., Mieszala, M., Schwiedrzik, J., Wheeler, J., Philippe, L., & Michler, J. (2017). Nanomechanical test specimen preparation techniques by microfabrication and two-photon polymerization to avoid FIB induced implantation damage. Presented at the Binnig and Rohrer nanotechnology center scientific symposium (BRNC). Zürich, Switzerland.