Interaction of ALD deposited Al203 films with remote fluorine plasma

Ruoho M, Guerra-Nuñez C, Polyakov M, Maeder X, Spring P, Andreaus B & Utke I
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Ruoho, M., Guerra-Nuñez, C., Polyakov, M., Maeder, X., Spring, P., Andreaus, B., & Utke, I. (2017). Interaction of ALD deposited Al203 films with remote fluorine plasma. Presented at the E-MRS fall meeting 2017. Warsaw, Poland: E-MRS.