Fracture of silicon: influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting

Lauener CM, Petho L, Chen M, Xiao Y, Michler J & Wheeler JM
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Lauener, C. M., Petho, L., Chen, M., Xiao, Y., Michler, J., & Wheeler, J. M. (2018). Fracture of silicon: influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting. Materials and Design, 142, 340-349. https://doi.org/10.1016/j.matdes.2018.01.015