Low temperature nano-crystalline diamond growth on high aspect ratio silicon structures

Pethö L, Antonin O, Schoeppner R, Gabureac M, Rats D, Nelis T & Michler J
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Pethö, L., Antonin, O., Schoeppner, R., Gabureac, M., Rats, D., Nelis, T., & Michler, J. (2018). Low temperature nano-crystalline diamond growth on high aspect ratio silicon structures. Presented at the 19th CMi annual review meeting. Lausanne.