Spectral artefacts post sputter-etching and how to cope with them – a case study of XPS on nitride-based coatings using monoatomic and cluster ion beams

Lewin E, Counsell J & Patscheider J
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Lewin, E., Counsell, J., & Patscheider, J. (2018). Spectral artefacts post sputter-etching and how to cope with them – a case study of XPS on nitride-based coatings using monoatomic and cluster ion beams. Applied Surface Science, 442, 487-500. https://doi.org/10.1016/j.apsusc.2018.02.191