Surface-anchored metal–organic frameworks as versatile resists for gas-assisted e-beam lithography: fabrication of sub-10 nanometer structures

Drost M, Tu F, Berger L, Preischl C, Zhou W, Gliemann H, Wöll C & Marbach H
Choose the citation style.
Drost, M., Tu, F., Berger, L., Preischl, C., Zhou, W., Gliemann, H., … Marbach, H. (2018). Surface-anchored metal–organic frameworks as versatile resists for gas-assisted e-beam lithography: fabrication of sub-10 nanometer structures. ACS Nano, 12(4), 3825-3835. https://doi.org/10.1021/acsnano.8b01071