Microfabrication of curved sidewall grooves using scanning nanosecond excimer laser ablation

Gong J, Violakis G, Infante D, Hoffmann P, Kostro A & Schüler A
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Gong, J., Violakis, G., Infante, D., Hoffmann, P., Kostro, A., & Schüler, A. (2018). Microfabrication of curved sidewall grooves using scanning nanosecond excimer laser ablation. In U. Klotzbach, K. Washio, & R. Kling (Eds.), Proceedings of SPIE: Vol. 10520. Laser-based micro- and nanoprocessing XII (p. 105200Z (8 pp.). https://doi.org/10.1117/12.2286908