Increasing the thermal stability of thin films by incorporating co-sputtered nanoparticles

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Pethö, L., Polyakov, M., Schoeppner, R., Thomas, K., Könnyü, B., Maeder, X., & Michler, J. (2018). Increasing the thermal stability of thin films by incorporating co-sputtered nanoparticles. Presented at the 16th international conference on plasma surface engineering. Garmisch-Partenkirchen, Germany.