Maskless lithography of silazanes for fabrication of ceramic micro-components

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Ligon, S. C., Blugan, G., & Kuebler, J. (2019). Maskless lithography of silazanes for fabrication of ceramic micro-components. Ceramics International, 45(2), 2345-2350. https://doi.org/10.1016/j.ceramint.2018.10.151