Development of a tape casting process for making thin layers of Si3N4 and Si3N4 + TiN

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Blugan, G., Morawa, K., Koebel, S., Graule, T., & Kuebler, J. (2007). Development of a tape casting process for making thin layers of Si3N4 and Si3N4 + TiN. Journal of the European Ceramic Society, 27(16), 4789-4795. https://doi.org/10.1016/j.jeurceramsoc.2007.02.211