Inkjet-printed and deep-UV-annealed YAlOx dielectrics for high-performance IGZO thin-film transistors on flexible substrates

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Bolat, S., Fuchs, P., Knobelspies, S., Temel, O., Torres Sevilla, G., Gilshtein, E., … Romanyuk, Y. E. (2019). Inkjet-printed and deep-UV-annealed YAlOx dielectrics for high-performance IGZO thin-film transistors on flexible substrates. Advanced Electronic Materials, 5(6), 1800843 (9 pp.). https://doi.org/10.1002/aelm.201800843