Focused electron beam induced processing

Fairbrother DH, Rosenberg SG, Hagen CW, Utke I & Swiderek P
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Fairbrother, D. H., Rosenberg, S. G., Hagen, C. W., Utke, I., & Swiderek, P. (2019). Focused electron beam induced processing. In O. Ingólfsson (Ed.), Low-energy electrons. Fundamentals and applications (pp. 219-284). Taylor & Francis.