Secondary particle properties for the ion beam sputtering of TiO2 in a reactive oxygen atmosphere

Bundesmann C & Amelal T
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Bundesmann, C., & Amelal, T. (2019). Secondary particle properties for the ion beam sputtering of TiO2 in a reactive oxygen atmosphere. Applied Surface Science, 485, 391-401. https://doi.org/10.1016/j.apsusc.2019.04.078