Effects of oxygen content and thermal annealing on sputtered a-IGZO Schottky diodes

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Ulianova, V., Bolat, S., Torres Sevilla, G., Shorubalko, I., & Romanyuk, Y. (2019). Effects of oxygen content and thermal annealing on sputtered a-IGZO Schottky diodes. In 2019 IEEE 39th International Conference on electronics and nanotechnology (ELNANO). Conference proceedings (pp. 88-91). https://doi.org/10.1109/ELNANO.2019.8783577