Fluorine gas coinjection as a solution for enhancing spatial resolution of time-of-flight secondary ion mass spectrometry and separating mass interference

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Priebe, A., Pethö, L., & Michler, J. (2020). Fluorine gas coinjection as a solution for enhancing spatial resolution of time-of-flight secondary ion mass spectrometry and separating mass interference. Analytical Chemistry, 92(2), 2121-2129. https://doi.org/10.1021/acs.analchem.9b04647