Preparation of clean MgO surface by oxygen plasma: comparison with standard substrate cleaning procedures

Geler-Kremer J, Posadas AB & Demkov AA
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Geler-Kremer, J., Posadas, A. B., & Demkov, A. A. (2020). Preparation of clean MgO surface by oxygen plasma: comparison with standard substrate cleaning procedures. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 38(6), 062201. https://doi.org/10.1116/6.0000371