Microstructure analysis of epitaxial BaTiO3 thin films on SrTiO3-buffered Si: strain and dislocation density quantification using HRXRD methods

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Borzì, A., Dolabella, S., Szmyt, W., Geler-Kremer, J., Abel, S., Fompeyrine, J., … Neels, A. (2020). Microstructure analysis of epitaxial BaTiO3 thin films on SrTiO3-buffered Si: strain and dislocation density quantification using HRXRD methods. Materialia, 14, 100953 (9 pp.). https://doi.org/10.1016/j.mtla.2020.100953