Deep-UV-enhanced approach for low-temperature solution processing of IZO transistors with high-k AlOx/YAlOx dielectric

Mancinelli A, Bolat S, Kim J, Romanyuk YE & Briand D
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Mancinelli, A., Bolat, S., Kim, J., Romanyuk, Y. E., & Briand, D. (2020). Deep-UV-enhanced approach for low-temperature solution processing of IZO transistors with high-k AlOx/YAlOx dielectric. ACS Applied Electronic Materials, 2(10), 3141-3151. https://doi.org/10.1021/acsaelm.0c00444