Practical aspects of focused ion beam time-of-flight secondary ion mass spectrometry analysis enhanced by fluorine gas coinjection

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Wieczerzak, K., Priebe, A., Utke, I., & Michler, J. (2021). Practical aspects of focused ion beam time-of-flight secondary ion mass spectrometry analysis enhanced by fluorine gas coinjection. Chemistry of Materials. https://doi.org/10.1021/acs.chemmater.1c00052