Crystallization behavior of ion beam sputtered HfO2 thin films and its effect on the laser-induced damage threshold

Balogh-Michels Z, Stevanovic I, Borzi A, Bächli A, Schachtler D, Gischkat T, Neels A, Stuck A & Botha R
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Balogh-Michels, Z., Stevanovic, I., Borzi, A., Bächli, A., Schachtler, D., Gischkat, T., … Botha, R. (2021). Crystallization behavior of ion beam sputtered HfO2 thin films and its effect on the laser-induced damage threshold. Journal of the European Optical Society-Rapid Publications, 17(1), 3 (8 pp.). https://doi.org/10.1186/s41476-021-00147-w