Smooth or not: robust fused silica micro-components by femtosecond-laser-assisted etching

Widmer RN, Bischof D, Jurczyk J, Michler M, Schwiedrzik J & Michler J
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Widmer, R. N., Bischof, D., Jurczyk, J., Michler, M., Schwiedrzik, J., & Michler, J. (2021). Smooth or not: robust fused silica micro-components by femtosecond-laser-assisted etching. Materials and Design, 204, 109670 (9 pp.). https://doi.org/10.1016/j.matdes.2021.109670