Magnetron sputter deposition of amorphous silicon–SiO2 quantized nanolaminates
Schwyn Thöny S, Bärtschi M, Batzer M, Baselgia M, Gmünder R, Sharma A, Vermeij T, Maeder X & Waldner S
Schwyn Thöny, S., Bärtschi, M., Batzer, M., Baselgia, M., Gmünder, R., Sharma, A., … Waldner, S. (2024). Magnetron sputter deposition of amorphous silicon–SiO2 quantized nanolaminates. Advanced Photonics Research, 5(12), 2400057 (8 pp.). https://doi.org/10.1002/adpr.202400057