Effect of residual stress and microstructure on mechanical properties of sputter-grown Cu/W nanomultilayers

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Lorenzin, G., Klimashin, F. F., Yeom, J., Hu, Y., Michler, J., Janczak-Rusch, J., … Cancellieri, C. (2024). Effect of residual stress and microstructure on mechanical properties of sputter-grown Cu/W nanomultilayers. APL Materials, 12(10), 101109 (9 pp.). https://doi.org/10.1063/5.0226849