Laser-induced forward transfer of SU-8 microdisks as carriers of metallic microdevices
Yang, Z., Boero, G., Widmer, R., Michler, J., Pero, R., & Brugger, J. (2024). Laser-induced forward transfer of SU-8 microdisks as carriers of metallic microdevices. Journal of Microelectromechanical Systems. https://doi.org/10.1109/JMEMS.2024.3487248