Process development of Ta2O5-SiO2quantized nanolaminates for the use of complex optical filter systems

Baertschi M, Waldner S, Steger F, Frei T, Thoeny SS, Maeder X, Schachtler D & Sturzenegger C
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Baertschi, M., Waldner, S., Steger, F., Frei, T., Thoeny, S. S., Maeder, X., … Sturzenegger, C. (2024). Process development of Ta2O5-SiO2quantized nanolaminates for the use of complex optical filter systems. In C. W. Carr, D. Ristau, C. S. Menoni, & M. D. Thomas (Eds.), Proceedings of SPIE: Vol. 13190. 56th annual laser damage symposium. Laser-induced damage in optical materials 2024 (p. 1319006 (9 pp.). https://doi.org/10.1117/12.3032939