On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

Grossenbacher J, Gullo MR, Bakumov V, Blugan G, Kuebler J & Brugger J
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Grossenbacher, J., Gullo, M. R., Bakumov, V., Blugan, G., Kuebler, J., & Brugger, J. (2015). On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS. Ceramics International, 41(1), 623-629. https://doi.org/10.1016/j.ceramint.2014.08.112