Morphology and crystallinity control of ultrathin TiO2 layers deposited on carbon nanotubes by temperature-step atomic layer deposition

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Guerra-Nuñez, C., Zhang, Y., Li, M., Chawla, V., Erni, R., Michler, J., … Utke, I. (2015). Morphology and crystallinity control of ultrathin TiO2 layers deposited on carbon nanotubes by temperature-step atomic layer deposition. Nanoscale, 7(24), 10622-10633. https://doi.org/10.1039/C5NR02106E