Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

Greczynski G, Patscheider J, Lu J, Alling B, Ektarawong A, Jensen J, Petrov I, Greene JE & Hultman L
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Greczynski, G., Patscheider, J., Lu, J., Alling, B., Ektarawong, A., Jensen, J., … Hultman, L. (2015). Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition. Surface and Coatings Technology, 280, 174-184. https://doi.org/10.1016/j.surfcoat.2015.09.001