Where is the limit? Yield strength improvement in silicon micro-structures by surface treatments

Schifferle A, Bandi T, Neels A & Dommann A
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Schifferle, A., Bandi, T., Neels, A., & Dommann, A. (2016). Where is the limit? Yield strength improvement in silicon micro-structures by surface treatments. Physica Status Solidi A: Applications and Materials, 213(1), 102-107. https://doi.org/10.1002/pssa.201532444