Different ways to improve the cleanliness of the sputter source in GD-OES systems

Aeberhard M, Nelis T, Michler J & Barisone E
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Aeberhard, M., Nelis, T., Michler, J., & Barisone, E. (2008). Different ways to improve the cleanliness of the sputter source in GD-OES systems. Presented at the GD-OES deutsches Anwendertreffen. Berlin, Germany.
https://www.dora.lib4ri.ch/empa/islandora/object/empa:8603
Details
Publication Type

Conference Item

Title

Different ways to improve the cleanliness of the sputter source in GD-OES systems

Author(s)

Aeberhard, M. (401 Protection and Physiology)

Nelis, T.

Michler, J. (206 Mechanics of Materials and Nanostructures)

Barisone, E. (000 Empa)

Editor(s)

(editor)

Publication Year

2008

Conference

GD-OES deutsches Anwendertreffen

Conference Place

Berlin, Germany

Conference Date

April 16-18, 2008

Peer Review

No

Additional Information

poster