O2 and H2O enhanced FEBIE for fabrication of nanopores in few layer graphene

Pillatsch L, Vaz AR, Szkudlarek A, Guerra-Nuñez C, Zhang Y, Erni R, Alaferdov AV, Moshkalev S & Utke I
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Pillatsch, L., Vaz, A. R., Szkudlarek, A., Guerra-Nuñez, C., Zhang, Y., Erni, R., … Utke, I. (2015). O2 and H2O enhanced FEBIE for fabrication of nanopores in few layer graphene. Presented at the Electron, ion / photon beam technology and nanofabrication. San Diego, USA / Den Haag, NL.