Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films

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Fischer, M., Trant, M., Thorwarth, K., Crockett, R., Patscheider, J., & Hug, H. J. (2019). Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films. Science and Technology of Advanced Materials, 20(1), 1031-1042. https://doi.org/10.1080/14686996.2019.1666425