3D chemical mapping of thin films by means of X-ray laser microanalysis

Bleiner, D.; Trottmann, M.; Müller, R.; Rush, L.; Kuznezov, I.; Cabas-Vidani, A.; Romanyuk, Y.; Tiwari, A.; Patzke, G.R.; Menoni, C.S.; Rocca, J.J.

doi:10.1007/978-3-030-35453-4_1

3D chemical mapping of thin films by means of X-ray laser microanalysis

Bleiner D, Trottmann M, Müller R, Rush L, Kuznezov I, Cabas-Vidani A, Romanyuk Y, Tiwari A, Patzke GR, Menoni CS & Rocca JJ

Citation

Bleiner, D., Trottmann, M., Müller, R., Rush, L., Kuznezov, I., Cabas-Vidani, A., … Rocca, J. J. (2020). 3D chemical mapping of thin films by means of X-ray laser microanalysis. In M. Kozlová & J. Nejdl (Eds.), Springer proceedings in physics: Vol. 241. X-ray lasers 2018. Proceedings of the 16th international conference on X-ray lasers (pp. 3-10). https://doi.org/10.1007/978-3-030-35453-4_1

Persistent URL https://www.dora.lib4ri.ch/empa/islandora/object/empa:22713

A capillary discharge X-ray laser is a tabletop coherent source, which has matured for application in microanalysis. Soft X-ray pulses were delivered onto functional materials to induce photo-ablation in the nanoscale. Such samplings were measured inline by means of mass spectrometry, and thus perform depth profile analysis. This paper discusses the complementarity or this technique to contending microanalytical techniques, to have a direct methodology for space resolved in situ thin film characterization.

Details

Publication Type

Proceedings Paper

Title

3D chemical mapping of thin films by means of X-ray laser microanalysis

Author(s)

Bleiner, D. (502 Advanced Analytical Technologies)

Trottmann, M. (502 Advanced Analytical Technologies)

Müller, R.

Rush, L.

Kuznezov, I.

Cabas-Vidani, A. (207 Thin Films and Photovoltaics)