Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

Dalcanale F, Grossenbacher J, Blugan G, Gullo MR, Lauria A, Brugger J, Tevaearai H, Graule T, Niederberger M & Kuebler J
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Dalcanale, F., Grossenbacher, J., Blugan, G., Gullo, M. R., Lauria, A., Brugger, J., … Kuebler, J. (2014). Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications. Journal of the European Ceramic Society, 34(15), 3559-3570. https://doi.org/10.1016/j.jeurceramsoc.2014.06.002