Improved contact damage resistance of hydrogenated diamond-like carbon (DLC) with a ductile α-Ta interlayer

Bernoulli D, Rico A, Wyss A, Thorwarth K, Best JP, Hauert R & Spolenak R
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Bernoulli, D., Rico, A., Wyss, A., Thorwarth, K., Best, J. P., Hauert, R., & Spolenak, R. (2015). Improved contact damage resistance of hydrogenated diamond-like carbon (DLC) with a ductile α-Ta interlayer. Diamond and Related Materials, 58, 78-83. https://doi.org/10.1016/j.diamond.2015.06.006