Towards the correlation of mechanical properties and sawing parameters of silicon wafers

Bidiville A, Wasmer K, Michler J, Ballif C, Van der Meer M & Nasch PM
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Bidiville, A., Wasmer, K., Michler, J., Ballif, C., Van der Meer, M., & Nasch, P. M. (2008). Towards the correlation of mechanical properties and sawing parameters of silicon wafers. In Proceedings of the 22nd European photovoltaic solar energy conference (pp. 1130-1134).