Efficient optimization of high vacuum chemical vapor deposition of niobium oxide on full wafer scale

Dabirian A, Kuzminykh Y, Harada S, Parsons C, Sandu SC, Wagner E, Benvenuti G, Rushworth S, Muralt P & Hoffmann P
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Dabirian, A., Kuzminykh, Y., Harada, S., Parsons, C., Sandu, S. C., Wagner, E., … Hoffmann, P. (2010). Efficient optimization of high vacuum chemical vapor deposition of niobium oxide on full wafer scale. In IOP conference series: materials science and engineering: Vol. 8. Fundamentals and technology of multifunctional oxide thin films (symposium G, EMRS 2009 spring meeting) 8–12 June 2009, Strasbourg, France (p. 012026 (4 pp.). https://doi.org/10.1088/1757-899X/8/1/012026