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  • (-) Organizational Unit = 405 Transport at Nanoscale Interfaces
  • (-) Publication Year = 2006 - 2006
  • (-) Keywords = focused ion beam structuring
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FIB-milling of photonic structures and sputtering simulation
Nellen, P. M., Callegari, V., & Brönnimann, R. (2006). FIB-milling of photonic structures and sputtering simulation. Microelectronic Engineering, 83(4-9), 1805-1808. https://doi.org/10.1016/j.mee.2006.01.176
Milling micro-structures using focused ion beams and its application to photonic components
Nellen, P. M., & Brönnimann, R. (2006). Milling micro-structures using focused ion beams and its application to photonic components. Measurement Science and Technology, 17(5), 943-948. https://doi.org/10.1088/0957-0233/17/5/S01