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Combined testing for MEMS characterization
Schifferle, A., Neels, A., Papes, O., Dommann, A., & Mazza, E. (2010). Combined testing for MEMS characterization. In B. Jakoby & M. J. Vellekoop (Eds.), Procedia engineering: Vol. 5. Eurosensor XXIV conference (pp. 878-881). https://doi.org/10.1016/j.proeng.2010.09.249