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  • (-) Journal = 2014 IEEE 27th international conference on micro electro mechanical systems (MEMS)
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High aspect ratio, large area silicon-based gratings for X-ray phase contrast imaging
Baborowski, J., Revol, V., Kottler, C., Kaufmann, C., Niedermann, P., Cardot, F., … Despont, M. (2014). High aspect ratio, large area silicon-based gratings for X-ray phase contrast imaging. In 2014 IEEE 27th international conference on micro electro mechanical systems (MEMS) (pp. 490-493). https://doi.org/10.1109/MEMSYS.2014.6765684